台灣CMOS 微機電產業之發展機會

Abstract

微機電系統(Micro Electro-Mechanical Systems, MEMS)在消費性產品的應用領域具備高度的成長性，其中，MEMS的製程設備與CMOS的製程設備相容性高，調整過的CMOS的設備，配合MEMS製程技術與配方後，可以應用於製造MEMS。因此，台灣若能夠妥善運用過去在CMOS半導體產業的成功經驗並整合既有優勢，提出高附加價值的創新商業模式，將可藉由高度成熟的CMOS產業帶動MEMS產業的發展。也可以提高台灣CMOS晶圓廠及IC封測廠舊有設備的利用價值，拓展台灣晶圓代工與封測業者的市場範疇。並有助於MEMS 設計業者能夠跨越自有廠房的高昂投資門檻，快速的設計市場所期待的新產品，並且透過CMOS的標準製程技術，快速量產上市。然而，要在不改變既有CMOS的IC晶圓代工標準流程中，導入MEMS結構設計，必須克服諸多機械及電路設計製造技術之間互不相容之跨領域技術瓶頸。本研究運用產業分析模式與關鍵成功因素理論，透過國內外相關研究與文獻之蒐集與評論，彙整台灣半導體產業進入MEMS市場時，所面臨的機會與挑戰，並提出具體的發展策略建議。作為台灣半導體業者複製成功經驗時，策略佈局之參考。

As micro technology keeps improving dramatically in these two decades, MEMS(Micro Electro-Mechanical Systems) products are more widely adopted recently. MEMS creates many miniaturized mechanical functional devices in addition to the well known electrical transistors on VLSI. However, what will be the next booming applications? What kind of manufacturing technology advantages and supply chain advantages does Taiwan possess to play a key role in this worldwide competing industry? This thesis analyzes the opportunity of Taiwan to compete with existing IDM companies based on Taiwan’s uniqueness through several industry analysis theories such as Life Cycle、Key Success Factor、SWOT、Porter’s Diamond Determinants of National Advantage and Sun-Wu Art of War. The conclusion is: by using Post-CMOS MEMS standard manufacturing process together with CMOS layer bulk micro-machining, Taiwan can leverage existing advantages on CMOS supply chain of design、manufacturing and packaging, with least additional hardware equipment investment, to produce most cost effective MEMS devices for 3C markets. Meanwhile, more Taiwan design houses can take advantage of this manufacturing environment and design new applications to compete with existing players and gain market share.