矽奈米線生物感測器之分析與模擬

Abstract

在本論文中提供一個廣泛適用於矽奈米線生物感測器模擬的架構。使用這種模擬的架構，我們系統化地探討元件設計對生物感測器靈敏度的所造成影響。同時，我們也探討因為本質參數變異對矽奈米線生物感測器所造成的影響，其中包含了隨機參雜濃度變動 (Random Dopant Fluctuation)、線邊緣的粗糙程度 (Line-edge Roughness)。經由模擬的結果，我們得知一個擁有較低摻雜濃度、較小通道半徑與較短通道長度的矽奈米線生物感測器有更好的靈敏度與抵抗靈敏度擾動的能力。而當通道半徑小於十奈米，量子效應會進一步的驅動生物感測器靈敏度的成長。另一方面，我們研究在電解液中使用擴散型電子流抑制遮蔽效應對生物感測器所造成的影響。研究發現，使用擴散型電子流十分有效的抑制遮蔽效應，在一個輕摻雜、小通道半徑的生物感測器上靈敏度會明顯的增加，特別是在摻雜原子與待測分子的之間所帶電性相反的情況下。除此之外，天線型矽奈米線生物感測器的分析與模擬，在本論文中也將做進一步的討論。

This thesis provides a comprehensive simulation framework for silicon nanowire (Si-NW) biosensors. Using this simulation framework, we have systematically investigated the impact of device design on the sensitivity of Si-NW biosensors. In addition, we have examined the impacts of intrinsic parameter fluctuations such as random dopant fluctuations (RDF) and line-edge roughness (LER). Our study indicates that Si-NW biosensors with smaller diameter, shorter channel length, and lower channel doping have better sensitivity and less sensitivity variation. When diameter is smaller than ~10nm, the quantum effect further enhances the sensitivity. Regarding the suppression of screening effects, our simulations indicate that the electro-diffusion flow can significantly suppress the screening effects in the electrolyte solution, and Si-NW biosensors with lower channel doping and smaller diameter have more enhancements in the sensitivity, especially for the accumulation mode. Besides, the structure of Si-NW biosensor with antenna has been simulated and analyzed.