標題: 具高靈敏度生物感測之矽锗奈米線於氟強化鈍化處裡技術應用之特性研究
Investigation of Fluorine enhanced oxide passivation on SiGe nanowire with high sensitivity bio-sensor
作者: 張泰源
Chang, Tai-Yuan
張國明
許博淵
Chang, Kow-Ming
Shew, Bor-Yuan
工學院加速器光源科技與應用碩士學位學程
關鍵字: 矽鍺;奈米線;生物感測器;氟強化鈍化處裡;靈敏度;Fluorine enhanced oxide passivation;SiGe;nanowire;sensitivity;bio-sensor
公開日期: 2015
URI: http://140.113.39.130/cdrfb3/record/nctu/#GT070051810
http://hdl.handle.net/11536/126287
顯示於類別:畢業論文