具高靈敏度生物感測之矽锗奈米線於氟強化鈍化處裡技術應用之特性研究

標題:	具高靈敏度生物感測之矽锗奈米線於氟強化鈍化處裡技術應用之特性研究 Investigation of Fluorine enhanced oxide passivation on SiGe nanowire with high sensitivity bio-sensor
作者:	張泰源 Chang, Tai-Yuan 張國明許博淵 Chang, Kow-Ming Shew, Bor-Yuan 工學院加速器光源科技與應用碩士學位學程
關鍵字:	矽鍺;奈米線;生物感測器;氟強化鈍化處裡;靈敏度;Fluorine enhanced oxide passivation;SiGe;nanowire;sensitivity;bio-sensor
公開日期:	2015
URI:	http://140.113.39.130/cdrfb3/record/nctu/#GT070051810 http://hdl.handle.net/11536/126287
Appears in Collections:	Thesis