ELLIPSOMETRY MEASUREMENT OF THE COMPLEX REFRACTIVE-INDEX AND THICKNESS OF POLYSILICON THIN-FILMS

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DC Field	Value	Language
dc.contributor.author	HO, JH	en_US
dc.contributor.author	LEE, CL	en_US
dc.contributor.author	LEI, TF	en_US
dc.contributor.author	CHAO, TS	en_US
dc.date.accessioned	2014-12-08T15:05:38Z	-
dc.date.available	2014-12-08T15:05:38Z	-
dc.date.issued	1990-02-01	en_US
dc.identifier.issn	0740-3232	en_US
dc.identifier.uri	http://dx.doi.org/10.1364/JOSAA.7.000196	en_US
dc.identifier.uri	http://hdl.handle.net/11536/4180	-
dc.language.iso	en_US	en_US
dc.title	ELLIPSOMETRY MEASUREMENT OF THE COMPLEX REFRACTIVE-INDEX AND THICKNESS OF POLYSILICON THIN-FILMS	en_US
dc.type	Article	en_US
dc.identifier.doi	10.1364/JOSAA.7.000196	en_US
dc.identifier.journal	JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION	en_US
dc.citation.volume	7	en_US
dc.citation.issue	2	en_US
dc.citation.spage	196	en_US
dc.citation.epage	205	en_US
dc.contributor.department	交大名義發表	zh_TW
dc.contributor.department	電控工程研究所	zh_TW
dc.contributor.department	National Chiao Tung University	en_US
dc.contributor.department	Institute of Electrical and Control Engineering	en_US
dc.identifier.wosnumber	WOS:A1990CK60100002	-
dc.citation.woscount	14	-
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