ELLIPSOMETRY MEASUREMENT OF THE COMPLEX REFRACTIVE-INDEX AND THICKNESS OF POLYSILICON THIN-FILMS

標題:	ELLIPSOMETRY MEASUREMENT OF THE COMPLEX REFRACTIVE-INDEX AND THICKNESS OF POLYSILICON THIN-FILMS
作者:	HO, JH LEE, CL LEI, TF CHAO, TS 交大名義發表電控工程研究所 National Chiao Tung University Institute of Electrical and Control Engineering
公開日期:	1-Feb-1990
URI:	http://dx.doi.org/10.1364/JOSAA.7.000196 http://hdl.handle.net/11536/4180
ISSN:	0740-3232
DOI:	10.1364/JOSAA.7.000196
期刊:	JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION
Volume:	7
Issue:	2
起始頁:	196
結束頁:	205
Appears in Collections:	Articles

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