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dc.contributor.author蔡俊德en_US
dc.contributor.authorChun-Te Tsaien_US
dc.contributor.author李安謙en_US
dc.contributor.authorDr. An-Chen Leeen_US
dc.date.accessioned2014-12-12T01:28:11Z-
dc.date.available2014-12-12T01:28:11Z-
dc.date.issued2004en_US
dc.identifier.urihttp://140.113.39.130/cdrfb3/record/nctu/#GT009069520en_US
dc.identifier.urihttp://hdl.handle.net/11536/42024-
dc.description.abstract本論文目的,在設計一個以300mm集束型製程設備模擬器及訓練器,建構一個化學氣相沈積系統模擬器,並將模擬器與訓練器結合達到半導體設備及製程訓練功效。發展之訓練器除可提供一般市面上之訓練器之功能外(人機介面及一般操作功能),由於結合了模擬器可任意設定各種失效模式,訓練操作人員如何處理修復模式。並將模擬器的結果導入訓練器中,讓使用者可以在使用者介面上更改各個設定來了解各設定值對生產時的影響達到熟悉整個製程及設備間的關係。zh_TW
dc.description.abstractThis thesis is to design a simulator incorporated with trainer of a chemical vapor deposition system for 300mm cluster tool in semiconductor manufacture. The integration of simulator and trainer has many advantages that the commercial trainers can not provide. In addition to providing the functions available in the market, i.e. Human-computer Interface and normal operation, the developed trainer accepts any receipt by the operator then shows what the process is going on in terms of animation and process data display. It also provides fault modes to be adjusted on screen so that the operators can learn how to handle recovery modes. The user can thus change all set-ups on the user interface to learn the impact of each value on the production and become more familiar with the relationship between the whole processing and equipments.en_US
dc.language.isozh_TWen_US
dc.subject集束型半導體製程設備zh_TW
dc.subject化學氣相沈積zh_TW
dc.subject模擬器zh_TW
dc.subject訓練器zh_TW
dc.subjectMATLABzh_TW
dc.subjectcluster tool in semiconductor manufactureen_US
dc.subjectchemical vapor depositionen_US
dc.subjectsimulatoren_US
dc.subjecttraineren_US
dc.subjectMATLABen_US
dc.title集束型化學氣相沈積製程設備模擬器及訓練器之軟體設計製作zh_TW
dc.titleThe Development of a Software simulator with Trainer of Chemical Vapor Deposition Equipment for Cluster Tool Manufacturingen_US
dc.typeThesisen_US
dc.contributor.department工學院精密與自動化工程學程zh_TW
Appears in Collections:Thesis


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