薄膜體聲波共振腔設計與分析

Abstract

本論文利用薄膜體聲波共振腔設計出中心頻率在1.88 GHz接收端與1.93 GHz傳送端的頻率雙工器電路，同時配合共振腔製程上所遭遇的問題，設計出能立即實現的頻率雙工器電路。在設計過程中，本論文分析推導如何利用薄膜體聲波的物理特性，轉為可用軟體計算的等效共振腔模型，並利用電路模擬軟體進行薄膜體聲波共振腔的電路設計，減少製程上不必要的誤差，增加製程效率。 此外本論文中將說明如何設計薄膜體聲波共振腔的濾波電路，且利用可外加電感方式增進濾波器效能，並推導出所需外加的電感值，同時與電路模擬軟體一起最佳化，設計出薄膜體聲波共振腔的每層厚度與該層面積大小。

In this project, the thin film bulk acoustic wave resonator, or FBAR, are used to design the duplexer that its receiver and transmitter is at center frequency 1.88 GHz and 1.96 GHz, and this project also design a duplexer structure that can avoid the problem during the process. In the designed procedure, the method that how to extract the FBAR equivalent circuit from its physical characteristic, would be analyzed and established in the simulation tool. This FBAR equivalent circuit can help us to design FBAR filter in the simulation tool, and improve the efficiency when it is fabricated. The method that how to design the FBAR filter with external inductors would be introduced in this project, too. The external inductor can improve the performance when we are designing the filter, so how to figure out the external inductor values and simulate FBAR with inductor would also be analyzed.