標題: | STUDIES ON ARGON ION IMPLANT DAMAGED SILICON SURFACE BARRIERS |
作者: | CHIEN, HC ASHOK, S 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
公開日期: | 1-Sep-1986 |
URI: | http://hdl.handle.net/11536/4725 |
ISSN: | 0361-5235 |
期刊: | JOURNAL OF ELECTRONIC MATERIALS |
Volume: | 15 |
Issue: | 5 |
起始頁: | 296 |
結束頁: | 296 |
Appears in Collections: | Articles |