標題: BELT TRANSPORT CVD PROCESSING
作者: LEE, MK
LU, CY
SHIH, CT
電控工程研究所
Institute of Electrical and Control Engineering
公開日期: 1983
URI: http://hdl.handle.net/11536/4943
ISSN: 0013-4651
期刊: JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume: 130
Issue: 11
起始頁: 2249
結束頁: 2252
Appears in Collections:Articles


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