高直線度線性掃描平台之設計與特性研究

Abstract

本論文為研究並設計一高直線度線性掃描平台，機構設計上以撓性方式導引達成Z方向高直線度目標、並以可移動永久磁鐵的間接致動方式來得到較大的位移行程。使用Ansys軟體模擬結構位移時之應力，以此結果計算設計撓性樑長度與厚度等尺寸。並建立磁鐵位置、磁力與撓性結構剛性之相關數學模型，探討非線性關係，得以實現線性控制方法與結果。 設計完成後，以電腦程式做整合控制，成功以55μm/s的掃描速率掃描一200 nm台階樣本，階高重複性達0.5奈米，達成本文所研究的高直線度掃描平台。

This thesis designs and researches a linear scanner with high straightness. Use flexible structures to achieve high straightness in Z axis and moveable permanent magnet to reach larger displacement. By analyzing the stress generated by displacement of structures by Ansys, the optimum size of flexible beam can be designed. Then according to the results of simulation, position of magnet, magnetic force, structure of stiffness and mathematical models would be established. Finally, the experimental results present the linear control methods to correct non-linear displacement and scan a 200nm step height sample with 0.5nm resolution successfully.