GROWTH-KINETICS OF SILICON THERMAL NITRIDATION

標題:	GROWTH-KINETICS OF SILICON THERMAL NITRIDATION
作者:	WU, CY KING, CW LEE, MK CHEN, CT 電控工程研究所 Institute of Electrical and Control Engineering
公開日期:	1982
URI:	http://hdl.handle.net/11536/4955
ISSN:	0013-4651
期刊:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	129
Issue:	7
起始頁:	1559
結束頁:	1563
Appears in Collections:	Articles

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