應用多入射角於影像式橢圓偏光術在表面電漿共振量測

Abstract

本論文將介紹簡式影像式橢圓儀應用於表面電漿共振的量測，並利用柱狀透鏡製造多入射角，擷取光強度與相位隨角度分佈的圖形。簡式橢圓儀乃由偏振片、待測物與析光片所組成，藉由三點量測技術和數值計算，可得到不受偏振片與析光片方位角誤差影響的橢圓參數。搭配擴束系統、柱狀透鏡與電荷耦合元件，在不必移動任何光學元件之下，同時進行多入射角測量。 以下實驗先以矽標準片，做為測試簡式影像式橢圓儀搭配會聚光束量測的可靠性。接著分別以空氣和水為待測物，進行表面電漿共振的實驗。同時探討不同入射角的光束，在空氣與稜鏡介面所受到的偏極態改變，並以理論計算消去此一影響。

This work presents the application of polarizer—sample—analyzer (PSA) imaging ellipsometer in measuring the ellipsometric parameters under the surface plasmon resonance (SPR) configuration. By using cylindrical lens to produce multiple incident angles, one can obtain the ellipsometric parameters for a fan shaped incident angles. A PSA ellipsometer is composed of polarizer, sample, and analyzer. Using three-intensity technique and numeric calculations, one can measure the ellipsometric parameters without calibrating the errors of azimuth angles of polarizer and analyzer. Through beam expander, cylindrical lens and charge-coupled device (CCD), a fan-shaped multiple incident angle measurement can be achieved without adjusting any optical elements. At the beginning, a standard silicon wafer is used to test the reliability of PSA imaging ellipsometer with converging beam through a regular reflection condition. Then, we calibrate the SPR experiment by air. In the end, we measure the water by the same setup around its resonant angle. All measured results are compared with the theoretical model.