A MODEL FOR THE DEPOSITION OF PHOSPHORUS IN SILICON

標題:	A MODEL FOR THE DEPOSITION OF PHOSPHORUS IN SILICON
作者:	GUO, SF 電控工程研究所 Institute of Electrical and Control Engineering
公開日期:	1982
URI:	http://hdl.handle.net/11536/4985
ISSN:	0013-4651
期刊:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	129
Issue:	3
起始頁:	C101
結束頁:	C101
顯示於類別：	期刊論文