PRE-EPITAXIAL AND POST-EPITAXIAL GETTERING OF STACKING-FAULTS IN SILICON

Title:	PRE-EPITAXIAL AND POST-EPITAXIAL GETTERING OF STACKING-FAULTS IN SILICON
Authors:	CHEN, MC SILVESTRI, VJ 工學院 College of Engineering
Issue Date:	1979
URI:	http://hdl.handle.net/11536/5106
ISSN:	0013-4651
Journal:	JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume:	126
Issue:	8
Begin Page:	C368
End Page:	C368
Appears in Collections:	Articles

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