標題: | Angle measurement using total-internal-reflection heterodyne interferometry |
作者: | Chiu, MH Su, DC 交大名義發表 光電工程學系 National Chiao Tung University Department of Photonics |
關鍵字: | angle measurement;total-internal-reflection effect;heterodyne interferometry |
公開日期: | 1-Jun-1997 |
摘要: | A new optical method for angle measurement based on total-internal-reflection heterodyne interferometry is presented. In this method, heterodyne interferometry is applied to measure the phase difference between s and p polarization states at total internal reflection. This phase difference depends on the angle of incidence. Hence, small-angle measurement can be performed only by evaluating this phase difference. The validity of the method is demonstrated, and it has a measurement range of 10 deg. Its resolution depends on the angle of incidence; the best resolution is 8x10(-5) deg. (C) 1997 Society of Photo-Optical Instrumentation Engineers. |
URI: | http://hdl.handle.net/11536/511 |
ISSN: | 0091-3286 |
期刊: | OPTICAL ENGINEERING |
Volume: | 36 |
Issue: | 6 |
起始頁: | 1750 |
結束頁: | 1753 |
Appears in Collections: | Articles |
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