標題: | 高/低摻雜濃度矽晶於N2O氣體的熱氧化及其元件應用 Thermal oxidation of lightly and heavily doped silicon in N2O and it device applications |
作者: | 張鴻儀 孫喜眾 張國明 電子研究所 |
公開日期: | 1984 |
URI: | http://140.113.39.130/cdrfb3/record/nctu/#NT732428006 http://hdl.handle.net/11536/52025 |
Appears in Collections: | Thesis |