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dc.contributor.author翁炳國en_US
dc.contributor.author謝正雄en_US
dc.date.accessioned2014-12-12T02:04:14Z-
dc.date.available2014-12-12T02:04:14Z-
dc.date.issued1986en_US
dc.identifier.urihttp://140.113.39.130/cdrfb3/record/nctu/#NT752124002en_US
dc.identifier.urihttp://hdl.handle.net/11536/52812-
dc.language.isoen_USen_US
dc.title矽之微細加工技術及應用zh_TW
dc.titleSilicon micromachining technique and applicationsen_US
dc.typeThesisen_US
dc.contributor.department光電工程學系zh_TW
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