射頻磁控濺鍍之氧化銦錫薄膜與披覆抗反射耐磨耗覆層之氧化銦錫薄膜

標題:	射頻磁控濺鍍之氧化銦錫薄膜與披覆抗反射耐磨耗覆層之氧化銦錫薄膜 R. F. magnertron sputtered ITO films and ITO films with antireflective and hard coating
作者:	吳文發 Wu, Wen Fa 邱碧秀 Qiu, Bi Xiu 電子研究所
公開日期:	1993
URI:	http://140.113.39.130/cdrfb3/record/nctu/#NT822430008 http://hdl.handle.net/11536/58520
Appears in Collections:	Thesis