濺鍍WO3薄膜的電色研究及固態電色CO2氣體感測元件

Abstract

當WO3薄膜外加負陰極偏壓,使得H+離子注入WO3界面時,可使得WO3形成顏 色的變化。WO3電色可從淺黃色變到深藍色,電色反應隨不同的條件而變。 當濺鍍溫度越高,薄膜越厚,外加偏壓越大,電解質濃度越高,則WO3的穿透 率改變越大。在固態電解質電色反應中,穿透率改變達80%。當以 PVA/ KHCO3做固態電解質披覆在WO3上,外加固定偏壓,則當CO2溶於PVA內所含殘 於水份時,會產生酸化作用,解離出氫離子而使得WO3產生電色反應 ,可對 CO2做感測。在光學性的感測中,穿透率改變達12%,外加偏壓的大小為3V。 The color of WO3 changes from yellowish to dark blue when H+ has been intercalated in the surface of WO3 resulting from the inverse bias on cathod.This is the electrochromism of WO3 and is highly dependent on many conditions:The transmittance will be altered more as the sputtering temperature is higher, the film is thicker,the bias is larger or the concentration of electrolyte is higher.The transmittance change 80% in the electrochromism experimental in solid electrolyte.The PVA/KHCO3 solid electrolyte covered,bias tungsten trioxide will achieve electrochromic reaction when H+ is dissociated from acidific- ation of bicarbonate contained PVA due to the dissolved CO2. Thus CO2 can be sensed by this way.In the optical sensing expe- riment,12% change in transmittance is measured.The bias is 3V.