標題: Nanoparticle Manipulation Using Atomic Force Microscopy
作者: Tsai, Meng-Yen
Liu, Tzong-Shi
機械工程學系
Department of Mechanical Engineering
關鍵字: nanoparticle;X-Y stage;nanomanipulation
公開日期: 1-Feb-2010
摘要: To develop nanotechnology, nanoparticle manipulation plays all Important role in the assembly of nanoelements This Study aims to Manipulate nanoparticles using an atomic force microscope and X-Y positioning stage Strain gauges serve as sensors to Measure the travel distance of piezo-drivers in an X-Y stage In all atomic force microscopy system Nanoparticles are pushed based oil sliding mode control whose robust properties can deal with model uncertainty and disturbance In addition, a fuzzy controller is responsible for compensating "up-particle contact loss". so its to establish all accurate and stable manipulation system Experimental results demonstrate pushing nanoparticles oil Inclined substrates, different limited scanning ranges with different slope angles, and removing and remaining nanoparticles oil inclined substrates.
URI: http://hdl.handle.net/11536/5941
ISSN: 0257-9731
期刊: JOURNAL OF THE CHINESE SOCIETY OF MECHANICAL ENGINEERS
Volume: 31
Issue: 1
起始頁: 29
結束頁: 37
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