三層多晶矽電熱式微致動器與微滑桿致動系統之製作、分析與研究

Abstract

本論文是以研製三層多晶矽為主之電熱式微致動器，並應用此微致動器 陣列 及電容式微感測器設計完成一微滑桿致動系統，首先簡單的介紹我 們所採用 的三層多晶矽表面微機械製程。然後我們利用微機電製程模擬 軟體IntelliCAD來進行製程的模擬及建立整個元件的基礎模型，並以有限 元素分析軟體ANSYS 模擬電熱式微致動器之暫態特性及動態行為，且在三 層多晶矽製程方法之架 構下，設計一微滑桿致動系統，並針此致動系統 之驅動與感測原理加以分析 探討，以了解其動作情形與進行控制的可能 性，最後並設計一PC-based的閉 迴路控制電路I/O介面卡，包括輸出入 介面電路、感測電路等，期能達到精 確位置控制的目的。 This research describes a MEMS sliding device that can be used for position control of optical devices. This MEMS device consists of actuator, sensor and linear sliding block that are fabricated by using the Multi-User MEMS Processes(MUMPs). Firstly, by using MEMSprocess simulation software, Intellicad, we could analyze the givenfabrication process so that the designed MEMS device canbe successfully manufacture. Secondly, by adapting ANSYS finite element analysissoftware, we are able to analyze the dynamic characteristic of the designed actuator driven by electrical voltage and heat. A build-in sensor based on variable capacitance is also developed to measure the displacement of the traveling slider. Finally, a PC-based feedback control design, which consistsof I/O interface, actuating and sensing circuits, is developed and tried to achieve the goal: position control of a MEMS sliding device.