標題: 特殊的垂直放射雷射元件的封裝結構
Novel Package Vertical Structure of Emission Laser
作者: 于世珩
Yu, Shi-Han
謝正雄
黃凱風
Shie, Jin-Shown
Huang, Kai-Feng
電子物理系所
關鍵字: 雷射;封裝
公開日期: 1997
摘要: 本論文欲以矽之異方性蝕刻技術,在矽晶片上製作一種具有四十 五度斜面之W型槽,並利用氧化犧牲法,使斜面更平整達光學程度。 在此結構上黏置邊射型半導體雷射,使其達到垂直發射的功能。此種 垂直發射的結構十分簡化雷射的包裝方式及成本。
This thesis is to study a novel technology of the fabrication of a vertical emitting semiconductor laser. This technique is a combination of an edgeemitting semiconductor laser and a silicon micro-machining W-groove which has forty-five degree mirror-like oblique planes made by oxidation- smooth method. With the edge emitting semiconductor laser packaged on the middle of the W-groove, reflected light will be perpendicular to the incident light, that is, as a vertical emitting semiconductor laser. This vertical emitting structure with simplifying laser package has the advantage for automation and cost lower.
URI: http://140.113.39.130/cdrfb3/record/nctu/#NT863429011
http://hdl.handle.net/11536/63429
Appears in Collections:Thesis