集束型製程設備之製程模組控制器設計與測試

Abstract

本論文主要設計一符合國際半導體設備及材料協會標準的製程模組控制器。重點在利用UML工具以物件導向方式觀念設計一個整合容易、擴充方便的軟體架構，並以Java程式語言來實作。為了提供更大的彈性，此控制器可以單機獨立運作，亦可整合於集束型製程設備中。論文中將說明300 mm集束型製程設備的硬體與軟體架構，並介紹有關通訊介面的規範，以及製程模組控制器所應具備的功能。製程模組控制器功能分別為製程工作管理、傳輸工作管理、事件回報、例外處理與配方管理。本論文中會以實作快速熱處理控制器為例子。

In this thesis, we develop a process module controller that conforms to SEMI standard. The main point is to use object-oriented method to develop a flexible and reusable software architecture where the UML is adopted to analyze and design the controller and Java program language is used to implement the RTP controller. The controller can be integrated into the cluster tools or be operated stand-alone. In the presentation flow of the thesis, we will introduce the 300mm cluster tools, and the communication interface and the capabilities of process module controller. The last one is the focus of this thesis, which includes “process job management”, “transfer job management”, “event reporting”, “exception handling”, and “recipe management”. Finally, the developed PMC is linked to the RTP simulator to test its capacity and performance, and the results are presented as well.