標題: 考慮黃光區綁機特性之派工法
Dispatching Rules With Dedicated Machines
作者: 黃友錄
Yu-Lu Huang
巫木誠
Muh-CherngWu
管理學院工業工程與管理學程
關鍵字: 黃光;綁機;再回流;生產線平衡;派工法則;machine-dedication;dedicated;dispatch;on-time delivery
公開日期: 2002
摘要: 現今半導體業在激烈競爭的環境下,不斷提升微小化製程技術,以強化產品功能及降低製造成本,但由於黃光微影機台群組的能力已不足以應付微小化製程所必須之精密度,以至於必須以綁機(Dedicated)的方式來進行生產。然而半導體製程有複雜、再回流、機台不穩定等特性,加上綁機的限制,導致生產週期時間不易控制,甚或延誤交貨。 目前少有針對綁機問題的派工及綁機決策研究,以目前的派工方法亦不足以解決綁機造成的績效損失,所以本文透過研究生產線平衡(Line Balance),以在製品與生產週期之關聯,發展能同時平衡在製品約當流量,及避免黃光瓶頸機台飢餓的綁機決策法、黃光綁機派工法則、非黃光派工法則,以期改善生產週期及達交率。 經過本文模擬驗證,在綁機限制下,以本文所提出的派工法則,在改善生產週期以及達交率,均有顯著的改善,同時也證明在綁機限制下,派工方法比綁機決策法對改善績效有更顯著的幫助。
This research investigates the dispatching decisions in a semiconductor foundry fab with machine-dedication properties. Machine in a workstation may be dedicated or non-dedicated. A wafer once processed by a dedicated-machine, in the remaining operations, should be processed by the machine. The following decisions in the machine-dedication scenario are examined. How to allocate wafers to dedicated-machines? How to dispatch wafers to dedicated-machines? How to dispatch wafers to non-dedicated machines? This research proposes a decision rule for each of three decisions. Simulation experiments show that the proposed decisions outperform the current industrial practices, particularly in on-time delivery rate.
URI: http://140.113.39.130/cdrfb3/record/nctu/#NT911031008
http://hdl.handle.net/11536/71218
顯示於類別:畢業論文