表面聲波陀螺儀的設計

Abstract

近年來，微機電 (MEMS) 系統的感測器越來越受到重視。由於利用是標準積體電路製造技術製得，因此通常有輕量化、微小化、功率損耗較小和低成本等優點。表面聲波陀螺儀是由表面聲波諧振器 (surface acoustic wave resonator) 和表面聲波感測器 (surface acoustic wave sensor) 所組合而成。表面聲波陀螺儀相較於目前微機電陀螺儀本身的性能的限制，具有低成本、強健性和穩定性等優點。本研究中，針對此種操作在射頻 (radio frequency) 的表面聲波陀螺儀的設計與其性能加以分析、探討。並且利用表面聲波元件其能量傳遞與粒子真實位移的轉換，來預估表面聲波陀螺儀之感測精度。

The preliminary design and performance evaluation of a radio frequency MEMS gyroscope, based on a surface acoustic wave resonator (SAWR) and a surface acoustic wave sensor (SAWS) is presented in this work. In addition, the method to convert the transmitted power into exact particle displacement is introduced to predict the sensing resolution of this MEMS gyroscope. Microelectromechanical systems (MEMS) sensors have received more attention over the last decade. They generally have the advantages of being lightweight, small in size, low power consumption and low cost, due to standard IC fabrication techniques. The gyroscopes, operated on the surface acoustic wave, are expected to have a better performance limitations over current MEMS vibratory gyroscope designs, for example, low cost, better robustness and reliability.