ITO透明導電薄膜自動光學檢測系統比對樣本產生器之設計與實作

Abstract

ITO透明導電薄膜具低電阻率以及高光學穿透度，被廣泛應用於各種光電用品，包括平面顯示器、觸控面板以及新世代太陽電池。本研究旨在設計一套協助layout工程師，進行On-Cell touch sensor上ITO透明導電薄膜圖形分析的系統，以最快的時間得到分析的結果，並將結果提供給fab廠檢測人員，以進行導電薄膜自動檢測系統的圖形比對。比對後的結果，得以查知面板上瑕疵位置點，以進行後續改善措施並可提高面板的良率。 提高面板的良率，不但可以降低生產成本並增加公司獲利，且減少有瑕疵的面板對公司的聲譽也有不少的助益，故對面板廠商而言是最重要的目標。

ITO thin film which owns low electronic resistivity and high transmittance has been widely used in all kinds of optoelectronic devices, including TFT LCD. touch panel and solar cell. The purpose of this research is to design a system which can help layout engineers analyze ITO thin film patterns on On-Cell touch sensor in real time. Layout engineers provide the analysis result to inspection operators in the fabrication as matching patterns for the AOI system. The information of defect position on the panel from the AOI system can help process engineers to conduct following improvement on the process to improve yield rate in manufacturing processing. Increasing the yield rate of panels can not only reduce the production cost, but also increase the profits. Decreasing the panels with defects is also helpful to company reputation. Therefore, increasing the yield rate of panels is the most important goal to the TFT-LCD industry.