顯影液濃度控制系統的不變量分析

Abstract

彩色濾光片的製造程序裡，顯影液濃度是影響產品品質的關鍵因素。通常這濃度是透過可程式邏輯控制器來進行控制。預期中的智慧型可程式邏輯控制器必須能即時的偵測出製程中的任何異常。本論文使用裴氏圖建構系統的模型，並運用其不變量分析來實作智慧型可程式邏輯控制器。換言之，正常的製造程序裡不變量不應該改變；反之，任何違反不變量法則的狀態即表示系統出現異常。在彩色濾光片工廠實作此一智慧型可程式邏輯控制器後，當故障發生時，則系統就可立即偵測出其異常狀況。此外，本可程式邏輯控制器實作也可避免危害的擴散。

Developing chemical density is a key factor to affect the quality of color filters in their manufacturing process. Usually the density is controlled through a Programmable Logic Controller (PLC). Also an intelligent PLC is expected of detecting any malfunction in a real time way from the manufacturing process. In this thesis, such a PLC has been implemented using invariant analysis of Petri nets which is used for modeling the underlying manufacturing process. In other words, the invariants are conserved in a normal manufacturing process; however, any violated invariant means something wrong. After the implementation of this intelligent PLC in a color filter factory, the abnormal condition can be immediately detected whenever a malfunction occurs. Besides, this implementation avoids the expansion of damages.