標題: | CMOS Fully Compatible Embedded Non-Volatile Memory System With TiO(2)-SiO(2) Hybrid Resistive-Switching Material |
作者: | Lee, Ming-Daou Ho, ChiaHua Yao, Yeong-Der 材料科學與工程學系 Department of Materials Science and Engineering |
公開日期: | 1-三月-2011 |
摘要: | We demonstrate a non-volatile CMOS fully compatible embedded memory cell with a hybrid resistive switching material, TiO(2)-SiO(2), in a 0.18 mu m node CMOS process. Both voltage-and temperature-dependent transports indicate that a Schottky-type resistance switching model dominates the TiO(2) based transition-metal-oxide resistive random access memory (TMO-RRAM) system. Data retention is improved by inserting a very thin SiO(2) layer between the bottom electrode and TiO(2) film to enhance the Schottky barrier height, while maintaining TiO(2) based RRAM characteristics. |
URI: | http://dx.doi.org/10.1109/TMAG.2011.2106765 http://hdl.handle.net/11536/796 |
ISSN: | 0018-9464 |
DOI: | 10.1109/TMAG.2011.2106765 |
期刊: | IEEE TRANSACTIONS ON MAGNETICS |
Volume: | 47 |
Issue: | 3 |
起始頁: | 653 |
結束頁: | 655 |
顯示於類別: | 會議論文 |