退火效應對螺旋式電感感值變化之研究

Abstract

在這篇論文裡，主要是研究退火的效應對螺旋式電感的影響，在30分鐘還有600度Ｃ的退火溫度操作下，發現銅大約有7.4%的電阻值下降，但是對於同樣製作在同一片晶片上的電感而言，電感感值幾乎沒有發生變化。十組3.5圈的螺旋式電感中，退火前後的電感感值差異有- 2.25%到0.41%的變化，同時共振頻率有- 8.22%到1.68%的變化。對於這樣的改變，我們利用統計學上的方法來做檢定，檢定的結果認為此變化會來自於實驗的誤差，事實上退火效應對電感是不會造成影響。而這樣的結果也顯示導電率與螺旋式電感感值沒有相關性，此研究符合Greenhouse電感感值公式的預測，而非Chen et al.的模型。

In At this paper, thermal annealing effect on the inductor performance has been investigated. 30 mins. 600□C thermal annealing performed to have ~7.4% electrical resistivity reduction of Cu film won’t result in any inductance variance of on-chip spiral inductor that made of the same Cu. For a total of 18 3.5-circles on-chip spiral inductors, the inductance variance before and after the thermal anneal only ranges from -2.25% to 0.41%. Meanwhile, the resonant frequency associated with the inductance variance also changes from -8.22% to 1.68%. According to hypothesis test statistical method, it shows that these variances are not correlated which can be attributed to experimental variation and there is, in fact, no thermal annealing effect on the inductor performance. The results also indicate that the electrical conductivity is independent of the inductance of on-chip spiral inductor which is matched with the prediction of Greenhouse model but totally contradicts with the model proposed by Chen et al..