電漿後處理對於奈米碳管表面特性之影響

Abstract

摘 要 本論文主要係針對電漿後處理對於奈米碳管之表面特性做一深入研究。第一個主題為300W CF4電漿在CNTs成長後之結構觀察與表面形貌；第二個主題為300W CF4/O2電漿在CNT成長後之奈米碳管成長的關係研究；第三個主題則利用CF4、CF4/O2電漿對整片奈米碳管以及導線孔(via)中成長之奈米碳管進行後處理，觀察處理完成後碳管表面型態與品質的變化甚至到化學特性，分析儀器的部份包括：掃描式電子顯微鏡(SEM)、原子力顯微鏡(AFM)、穿透式電子顯微鏡(TEM)、傅立葉轉換紅外線光譜儀(FTIR)、X光光電子能譜儀 (XPS)及熱吸附性光譜儀(TDS)。 鎳觸媒層經過氫電漿前處理後，因熱能及氫電漿的蝕刻效應，使其顯微組織呈現微粒狀的島狀化金屬顆粒，此與奈米碳管成長有很大的關連性。碳管經CF4/O2電漿處理後有削短碳管的情況產生，此結果顯示可利用電漿將碳管削短，且對於非晶質碳去除的過程也相當有所助益。然而，碳管經CF4電漿處理後；對於其表面形態並未有明顯之改變。

Abstract This thesis studies the effect of plasma post-treatment on the surfacecharacteristic of carbon. nanotubes. The first topic is the 300W CF4 plasma to studies the structure and surface quality after growth of .carbon .nan-otubes.The second. topic focuses consider the 300W CF4/O2 plasma after growth of .carbon .nanotubes.The. third 1topic use CF4、CF4/O2 to carbon .nanotubes .which in via after plasma post-treatment. Surface shape and qu-ality a variation.Portion analysis includes scanning .electron .microscopy (SEM), transmission electron (microscopy (TEM), atomic force microscopy .(AFM) are used (to determine .surface1roughness and image .surface .topography. Element bonding is measured by. Fourier.-.transform.infrared .spe-ctroscopy ((FTIR). X-ray Photoelectron Spectroscopy (XPS) Termal Desorption Spectroscopy (TDS). . After. H2 .plasma .pre-treatment, Ni catalyst layer becomes island.-. like. .because of thermal energy and etching effect of H2 plasma and.these island.-.like Ni particle plays an important role in the subsequent growth of .carbon. nanotubes. If the size of Ni catalyst. particle. is .small, the .diameter .of carbon nanotubes is also small. .The .structure .of .carbon . nanotubes .does. not have obvious damage after H2 and CF4 plasma.treatment but CF4/O2 .plasma .shorten .the .length .of .carbon .nanotubes. This phenomenon also can find in carbon nanotubes growth in via. Interconnection will introduce carbon nanotubes instead of traditional .metal. in. the .future .and. We .report. an approach to shorten the1 length 1of1 carbon 1nanotubes .