標題: | Nanotip-enhanced microplasma devices |
作者: | Kim, Sung-O 交大名義發表 National Chiao Tung University |
關鍵字: | microdischarge;nanotips |
公開日期: | 1-Aug-2008 |
摘要: | Nanotip-enhanced microplasma devices have been successfully fabricated and operated with neon gas at room temperature. The panel-type microplasma device included nanotip and metal electrodes on the rear panel, which provided low discharge voltage, strong emission, and stable discharge phenomena. The nanotip with a radius below 10 nm enhances the electrical field distribution density. The electrical properties of neon discharges have been examined with pulsed waveforms from 2 to 20 kHz in neon with pressures from 4 x 10(4) to 10(5) Pa. |
URI: | http://dx.doi.org/10.1109/TPS.2008.922941 http://hdl.handle.net/11536/8543 |
ISSN: | 0093-3813 |
DOI: | 10.1109/TPS.2008.922941 |
期刊: | IEEE TRANSACTIONS ON PLASMA SCIENCE |
Volume: | 36 |
Issue: | 4 |
起始頁: | 1240 |
結束頁: | 1241 |
Appears in Collections: | Articles |
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