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dc.contributor.author黃調元en_US
dc.contributor.authorTIAO-YUANHUANGen_US
dc.date.accessioned2014-12-13T10:28:51Z-
dc.date.available2014-12-13T10:28:51Z-
dc.date.issued2000en_US
dc.identifier.govdocNSC89-2215-E009-037zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/88700-
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=542052&docId=99568en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.language.isozh_TWen_US
dc.subject閘極漏電流zh_TW
dc.subject前非晶化佈植zh_TW
dc.subjectGate leakage currenten_US
dc.subjectPreamorphization implanten_US
dc.title深次微米T型閘極金氧半電晶體之改良研製及其效應之研究zh_TW
dc.titleFabrication and Characterization of Deep-Submicron MOSFET with T-Gate Structure Using a Refined Process with Nitride/TEOS Stack Spaceren_US
dc.typePlanen_US
dc.contributor.department交通大學電子工程系zh_TW
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