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dc.contributor.author陳傑en_US
dc.date.accessioned2014-12-13T10:31:55Z-
dc.date.available2014-12-13T10:31:55Z-
dc.date.issued2000en_US
dc.identifier.govdocNSC89-2212-E009-046zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/91230-
dc.identifier.urihttps://www.grb.gov.tw/search/planDetail?id=501416&docId=90421en_US
dc.description.sponsorship行政院國家科學委員會zh_TW
dc.language.isozh_TWen_US
dc.subject半導體製程設備zh_TW
dc.subject多腔式製程設備zh_TW
dc.subject物件導向模型zh_TW
dc.subject物件導向設計zh_TW
dc.subject即時軟體硬體迴路模擬zh_TW
dc.subjectSemiconductor manufacturing equipmenten_US
dc.subjectCluster toolen_US
dc.subjectObject oriented modelingen_US
dc.subjectObject oriented designen_US
dc.subjectReal time softwareen_US
dc.subjectHardware in the loop simulationen_US
dc.title多腔式半導體製程設備之物件導向即時模擬控制系統zh_TW
dc.titleObject-Oriented Real-time Control System Simulator for Cluster Tools Semiconductor Equipmenten_US
dc.typePlanen_US
dc.contributor.department交通大學機械工程系zh_TW
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