多腔式半導體製程設備之物件導向即時模擬控制系統

Full metadata record

DC Field	Value	Language
dc.contributor.author	陳傑	en_US
dc.date.accessioned	2014-12-13T10:31:55Z	-
dc.date.available	2014-12-13T10:31:55Z	-
dc.date.issued	2000	en_US
dc.identifier.govdoc	NSC89-2212-E009-046	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/91230	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=501416&docId=90421	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.subject	半導體製程設備	zh_TW
dc.subject	多腔式製程設備	zh_TW
dc.subject	物件導向模型	zh_TW
dc.subject	物件導向設計	zh_TW
dc.subject	即時軟體硬體迴路模擬	zh_TW
dc.subject	Semiconductor manufacturing equipment	en_US
dc.subject	Cluster tool	en_US
dc.subject	Object oriented modeling	en_US
dc.subject	Object oriented design	en_US
dc.subject	Real time software	en_US
dc.subject	Hardware in the loop simulation	en_US
dc.title	多腔式半導體製程設備之物件導向即時模擬控制系統	zh_TW
dc.title	Object-Oriented Real-time Control System Simulator for Cluster Tools Semiconductor Equipment	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學機械工程系	zh_TW
Appears in Collections:	Research Plans

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