多腔式半導體製程設備之物件導向即時模擬控制系統

標題:	多腔式半導體製程設備之物件導向即時模擬控制系統 Object-Oriented Real-time Control System Simulator for Cluster Tools Semiconductor Equipment
作者:	陳傑交通大學機械工程系
關鍵字:	半導體製程設備;多腔式製程設備;物件導向模型;物件導向設計;即時軟體硬體迴路模擬;Semiconductor manufacturing equipment;Cluster tool;Object oriented modeling;Object oriented design;Real time software;Hardware in the loop simulation
公開日期:	2000
官方說明文件#:	NSC89-2212-E009-046
URI:	http://hdl.handle.net/11536/91230 https://www.grb.gov.tw/search/planDetail?id=501416&docId=90421
Appears in Collections:	Research Plans

Files in This Item:

If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.