| Title: | 複晶矽鍺與MILC在低溫複晶矽薄膜電晶體上之應用(III)---子計畫III：MILC低溫複晶矽薄膜電晶體之退火製程開發、新穎結構及小尺寸元件之製作及研究 Study of Low Temperautre MILC Poly-Si Film and Its Application on Novel Strucutre Small Dimensional TFTs |
| Authors: | 張俊彥 CHANG CHUN-YEN 國立交通大學電子工程學系 |
| Issue Date: | 2003 |
| Gov't Doc #: | NSC92-2215-E009-013 |
| URI: | http://hdl.handle.net/11536/92110 https://www.grb.gov.tw/search/planDetail?id=873412&docId=167318 |
| Appears in Collections: | Research Plans |
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