高介電常數閘極介電層材料製備與可靠性分析

Title:	高介電常數閘極介電層材料製備與可靠性分析 Preparation and Characterization of High-K Gate Dielectric Materials
Authors:	林鴻志 HORNG-CHIHLIN 國立交通大學電子工程研究所
Issue Date:	2003
Gov't Doc #:	NSC92-AT-7009-001
URI:	http://hdl.handle.net/11536/92282 https://www.grb.gov.tw/search/planDetail?id=884734&docId=169605
Appears in Collections:	Research Plans

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