電子迴旋共振他學氣相沈積系統之晶片座設計研發與製作

Full metadata record

DC Field	Value	Language
dc.contributor.author	張國明	en_US
dc.contributor.author	CHANG KOW-MING	en_US
dc.date.accessioned	2014-12-13T10:34:32Z	-
dc.date.available	2014-12-13T10:34:32Z	-
dc.date.issued	2002	en_US
dc.identifier.govdoc	NSC91-2622-E009-020-CC3	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/92817	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=730562&docId=137829	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	電子迴旋共振他學氣相沈積系統之晶片座設計研發與製作	zh_TW
dc.title	ECR-CVD Wafer Holder Design. Development and Manufacture	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學電子工程研究所	zh_TW
Appears in Collections:	Research Plans