矽化物超淺接面和接觸孔研發

標題:	矽化物超淺接面和接觸孔研發 Development of Silicide Ultra-Sallow Junction and Contact Hole
作者:	雷添福 LEI TAN-FU 交通大學電子工程研究所
關鍵字:	積體電路設計;超淺接面;接觸孔;Integrated circuit design;Ultra-shallow junction;Contact hole
公開日期:	2001
官方說明文件#:	NSC90-2215-E009-095
URI:	http://hdl.handle.net/11536/93461 https://www.grb.gov.tw/search/planDetail?id=665784&docId=126394
Appears in Collections:	Research Plans

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