微振信號處理在CMP製程之應用研究

Full metadata record

DC Field	Value	Language
dc.contributor.author	鄭璧瑩	en_US
dc.date.accessioned	2014-12-13T10:36:08Z	-
dc.date.available	2014-12-13T10:36:08Z	-
dc.date.issued	2001	en_US
dc.identifier.govdoc	NSC90-2212-E009-061	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/93799	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=645525&docId=121284	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.subject	微小振動信號處理	zh_TW
dc.subject	信號處理	zh_TW
dc.subject	單元式多處理程序	zh_TW
dc.subject	Small vibration signal processing	en_US
dc.subject	Signal processing	en_US
dc.subject	Cellular MultiProcessing (CMP)	en_US
dc.title	微振信號處理在CMP製程之應用研究	zh_TW
dc.title	The Investigation of Small Vibration Signal Procession on CMP	en_US
dc.type	Plan	en_US
dc.contributor.department	國立交通大學機械工程研究所	zh_TW
Appears in Collections:	Research Plans

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