寄生氧化層對具有原子層平坦之超薄氧化層的影響

Full metadata record

DC Field	Value	Language
dc.contributor.author	荊鳳德	en_US
dc.contributor.author	CHIN ALBERT	en_US
dc.date.accessioned	2014-12-13T10:36:25Z	-
dc.date.available	2014-12-13T10:36:25Z	-
dc.date.issued	2000	en_US
dc.identifier.govdoc	NSC89-2215-E009-071	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/93917	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=542127&docId=99589	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.language.iso	zh_TW	en_US
dc.subject	寄生氧化層	zh_TW
dc.subject	超薄氧化層	zh_TW
dc.subject	遷移率	zh_TW
dc.subject	Native oxide	en_US
dc.subject	Ultra-thin oxide	en_US
dc.subject	Mobility	en_US
dc.title	寄生氧化層對具有原子層平坦之超薄氧化層的影響	zh_TW
dc.title	The Effect of Native Oxide on Ultra-Thin Oxide (1.5-2.5nm) with Atomically Smooth Interface	en_US
dc.type	Plan	en_US
dc.contributor.department	交通大學電子工程系	zh_TW
Appears in Collections:	Research Plans

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