Title: | 寄生氧化層對具有原子層平坦之超薄氧化層的影響 The Effect of Native Oxide on Ultra-Thin Oxide (1.5-2.5nm) with Atomically Smooth Interface |
Authors: | 荊鳳德 CHIN ALBERT 交通大學電子工程系 |
Keywords: | 寄生氧化層;超薄氧化層;遷移率;Native oxide;Ultra-thin oxide;Mobility |
Issue Date: | 2000 |
Gov't Doc #: | NSC89-2215-E009-071 |
URI: | http://hdl.handle.net/11536/93917 https://www.grb.gov.tw/search/planDetail?id=542127&docId=99589 |
Appears in Collections: | Research Plans |
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