Title: 寄生氧化層對具有原子層平坦之超薄氧化層的影響
The Effect of Native Oxide on Ultra-Thin Oxide (1.5-2.5nm) with Atomically Smooth Interface
Authors: 荊鳳德
CHIN ALBERT
交通大學電子工程系
Keywords: 寄生氧化層;超薄氧化層;遷移率;Native oxide;Ultra-thin oxide;Mobility
Issue Date: 2000
Gov't Doc #: NSC89-2215-E009-071
URI: http://hdl.handle.net/11536/93917
https://www.grb.gov.tw/search/planDetail?id=542127&docId=99589
Appears in Collections:Research Plans


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