Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 張國明 | en_US |
| dc.contributor.author | CHANG KOW-MING | en_US |
| dc.date.accessioned | 2014-12-13T10:36:52Z | - |
| dc.date.available | 2014-12-13T10:36:52Z | - |
| dc.date.issued | 1999 | en_US |
| dc.identifier.govdoc | NSC88-2215-E009-046 | zh_TW |
| dc.identifier.uri | http://hdl.handle.net/11536/94225 | - |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=418084&docId=74163 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 極大型積體電路 | zh_TW |
| dc.subject | 耐火金屬 | zh_TW |
| dc.subject | 電介質 | zh_TW |
| dc.subject | 化學氣相沈積法 | zh_TW |
| dc.subject | 電子迴旋共振化學氣相沈積法 | zh_TW |
| dc.subject | 縱橫比 | zh_TW |
| dc.subject | ULSI | en_US |
| dc.subject | Refractory metal | en_US |
| dc.subject | Dielectrics | en_US |
| dc.subject | CVD | en_US |
| dc.subject | ECR-CVD | en_US |
| dc.subject | Aspect ratio | en_US |
| dc.title | 極大型積體電路元件相關耐火金屬化物及電介質技術 | zh_TW |
| dc.title | ULSI Devices Related Refractory Metal and Dielectrics | en_US |
| dc.type | Plan | en_US |
| dc.contributor.department | 交通大學電子工程研究所 | zh_TW |
| Appears in Collections: | Research Plans | |
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