Characterization of one-dimension edge roughness from far-field irradiance at subwavelength-scale precision

標題:	Characterization of one-dimension edge roughness from far-field irradiance at subwavelength-scale precision
作者:	Chu, Shu-Chun Chern, Jyh-Long 光電工程學系 Department of Photonics
關鍵字:	diffraction;subwavelength;measurement
公開日期:	15-四月-2008
摘要:	It is proposed and numerically verified that the one-dimensional edge roughness of test sample can be characterized by far-field irradiance measurement at subwavelength-scale precision with a constructed aperture playing as an optical ruler. The precision of the proposed scheme of measurement could be better than 3%, even when the edge roughness is in subwavelength-scale. The influence of sample thickness on the proposed measurement scheme is also investigated and considered. (C) 2007 Elsevier B.V. All rights reserved.
URI:	http://dx.doi.org/10.1016/j.optcom.2007.12.032 http://hdl.handle.net/11536/9450
ISSN:	0030-4018
DOI:	10.1016/j.optcom.2007.12.032
期刊:	OPTICS COMMUNICATIONS
Volume:	281
Issue:	8
起始頁:	1997
結束頁:	2001
顯示於類別：	期刊論文

文件中的檔案：

若為 zip 檔案，請下載檔案解壓縮後，用瀏覽器開啟資料夾中的 index.html 瀏覽全文。