标题: | Characterization of one-dimension edge roughness from far-field irradiance at subwavelength-scale precision |
作者: | Chu, Shu-Chun Chern, Jyh-Long 光电工程学系 Department of Photonics |
关键字: | diffraction;subwavelength;measurement |
公开日期: | 15-四月-2008 |
摘要: | It is proposed and numerically verified that the one-dimensional edge roughness of test sample can be characterized by far-field irradiance measurement at subwavelength-scale precision with a constructed aperture playing as an optical ruler. The precision of the proposed scheme of measurement could be better than 3%, even when the edge roughness is in subwavelength-scale. The influence of sample thickness on the proposed measurement scheme is also investigated and considered. (C) 2007 Elsevier B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.optcom.2007.12.032 http://hdl.handle.net/11536/9450 |
ISSN: | 0030-4018 |
DOI: | 10.1016/j.optcom.2007.12.032 |
期刊: | OPTICS COMMUNICATIONS |
Volume: | 281 |
Issue: | 8 |
起始页: | 1997 |
结束页: | 2001 |
显示于类别: | Articles |
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