標題: Long-term tool elimination planning for a wafer fab
作者: Chung, Shu-Hsing
Hsieh, Ming-Hsiu
工業工程與管理學系
Department of Industrial Engineering and Management
關鍵字: tool portfolio;capacity planning;semiconductor
公開日期: 1-Apr-2008
摘要: Wafer manufacturers must make decisions regarding tool elimination due to changes caused by demand, product mixes, and overseas fab capacity expansion. Such a problem is raised by leading semiconductor manufacturers in Taiwan. This paper is aimed at developing a sound mechanism for tool portfolio elimination based on determining which equipment can be pruned. In the proposed mechanism, product mix, wafer output, capital expenditure, tool utilization, protective capacity, and cycle time are taken into the overall evaluation. This paper develops an integer programming model to avoid trial-and-error and to obtain the optimal solution. Compared to the current industry approach, the results show that the proposed mechanism can effectively identify the correct tools for elimination with a large capital savings and little cycle time impact. (C) 2007 Elsevier Ltd. All rights reserved.
URI: http://dx.doi.org/10.1016/j.cie.2007.09.009
http://hdl.handle.net/11536/9489
ISSN: 0360-8352
DOI: 10.1016/j.cie.2007.09.009
期刊: COMPUTERS & INDUSTRIAL ENGINEERING
Volume: 54
Issue: 3
起始頁: 589
結束頁: 601
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