| 標題: | 單晶CVD薄膜和熔化成長法製程中的不穩定熱流與使其穩定之研究---總計畫(III) A Study of Generic Unstable Flow and Heat Transfer and Its Stabilization in CVD Thin Film and Melt Growth of Single Crystals (III) |
| 作者: | 林清發 LIN TSING-FA 交通大學機械工程系 |
| 關鍵字: | 浮力;不穩定流;半導體;化學氣相沉積法;薄膜單晶;Buoyancy;Unstable flow;Semiconductor;Chemical vapor deposition (CVD);Thin film single crystal |
| 公開日期: | 1998 |
| 官方說明文件#: | NSC87-2212-E009-028 |
| URI: | http://hdl.handle.net/11536/95032 https://www.grb.gov.tw/search/planDetail?id=353158&docId=63026 |
| Appears in Collections: | Research Plans |
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