| 標題: | 單晶CVD薄膜和熔化成長法製程中之不穩定熱流與使其穩定研究---子計畫一：水平單晶成長之不穩定熱流實驗與數值模擬研究(III) Experimental and Numerical Study of Unstable Flow and Heat Transfer in Horizontal CVD Growth of Single Crystal (III) |
| 作者: | 林清發 LIN TSING-FA 交通大學機械工程系 |
| 關鍵字: | 薄膜單晶;浮力;慣性力;渦流;對流;化學氣相沈積法;Thin film single crystal;Buoyancy;Inertia force;Vortex;Convection;Chemical vapor deposition (CVD) |
| 公開日期: | 1998 |
| 官方說明文件#: | NSC87-2212-E009-029 |
| URI: | http://hdl.handle.net/11536/95033 https://www.grb.gov.tw/search/planDetail?id=353163&docId=63027 |
| Appears in Collections: | Research Plans |
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