標題: 晶圓製造廠爐管區控檔片之單迴圈網路模式
A Single Loop Network Model for Dummy/Control Wafers in the Furnace Area Wafer Fabrication
作者: 彭文理
WEN LEAPEARN
國立交通大學工業工程與管理學系
關鍵字: 晶圓製造;爐管;單圈網路;半導體業;Wafer fabrication;Furnace tube;Single loop network;Semiconductor industry
公開日期: 2001
官方說明文件#: NSC90-2218-E009-015
URI: http://hdl.handle.net/11536/95399
https://www.grb.gov.tw/search/planDetail?id=674269&docId=128520
Appears in Collections:Research Plans


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