Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 張國明 | en_US |
| dc.contributor.author | CHANG KOW-MING | en_US |
| dc.date.accessioned | 2014-12-13T10:38:51Z | - |
| dc.date.available | 2014-12-13T10:38:51Z | - |
| dc.date.issued | 1996 | en_US |
| dc.identifier.govdoc | NSC85-2215-E009-061 | zh_TW |
| dc.identifier.uri | http://hdl.handle.net/11536/95802 | - |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=234690&docId=43085 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 極大型積體電路 | zh_TW |
| dc.subject | 縱橫比 | zh_TW |
| dc.subject | 電子迴旋共振化學氣相沈積 | zh_TW |
| dc.subject | 鎢化學氣相沈積 | zh_TW |
| dc.subject | VLSI | en_US |
| dc.subject | Aspect ratio | en_US |
| dc.subject | ECR-CVD | en_US |
| dc.subject | CVD-W | en_US |
| dc.title | 極大型積體電路元件相關耐火金屬化物及電介質技術 | zh_TW |
| dc.title | ULSI Devices Related Refractory Metals and Dielectrics Technologies | en_US |
| dc.type | Plan | en_US |
| dc.contributor.department | 國立交通大學電子工程學系 | zh_TW |
| Appears in Collections: | Research Plans | |
